Description
1 piece/58 €
5 pieces/245 €
25 pieces/1125 €
Please contact us for quotes on larger quantities !!!
Prime Si+Si3N4 Wafer
Size: 3”, Orientation: (100), Boron Doped, Thickness: 381± 25 μm, Coating 150 nm
Technical Properties:
Quality |
Prime |
Materials |
Si+Si3N4 |
Size(inch) |
3” |
Orientation |
(100) |
Coating |
150 nm |
Thickness (μm) |
381± 25 |
Doping |
Boron |
Resistivity (ohm.cm) |
1-10 |
Polished |
Double Side |
Silicon nitride (Si3N4,SiN) offers excellent mechanical and thermal stability.
It is commonly used for hard masks, as a dielectric material, or as a passivation layer.
Silicon nitride is very hard by nature and has good thermal shock resistance and oxidation resistance.
Silicon Nitride has good high temperature strength, creep resistance and oxidation resistance.
Silicon Nitride's low thermal expansion coefficient gives good thermal shock resistance.