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Vanadium Oxide Sputtering Targets

Vanadium oxide is the inorganic compound with the chemical formula of V2O5. It is a brown/yellow solid, although when freshly precipitated from aqueous solution, its colour is deep orange. Because of its high oxidation state, vanadium oxide is both an amphoteric oxide and an oxidizing agent. From the industrial perspective, it is the most important compound of vanadium, being the principal precursor to alloys of vanadium and is a widely used industrial catalyst.

Now let's look at one of the applications, thin film batteries, where vanadium oxide is used. Thin film batteries are composed of thin film cathode, anode and solid electrolyte. Most of the studies for thin film secondary batteries have been focused on preparation and electrochemical properties of thin film electrodes. This is because the discharge-charge capacity of thin film battery is mainly dependent on electrode materials. As the cathode electrode for lithium battery, lithium cobalt oxide (LiCoO2), lithium manganese oxide (LiMn2O4) and vanadium oxide (V2O5) have been studied. Among these, vanadium oxide is a promising material for the cathode of thin film battery due to its high discharge capacity and good cycle performance. Moreover, it can be prepared at room temperature by vacuum system such as sputtering and such a low-temperature preparation is of great beneficial to on-chip applications. In the preparation of vanadium oxide films by radio frequency (RF) sputtering technique, the stoichiometry, structure and orientation of vanadium oxide can be influenced by the process parameters such as RF power, reactive gas atmosphere, temperature and substrate. The nature of vanadium oxide films can also affect their electrochemical properties. Therefore, a careful control is required to obtain high quality vanadium oxide thin films for battery application.

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