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Cerium Oxide (CeO2) Sputtering Targets
Purity: 99.99%, Size: 3'', Thickness: 0.125''
Sputtering is a proven technology capable of depositing thin films from a wide variety of materials on to diverse substrate shapes and sizes.
The process with sputter targets is repeatable and can be scaled up from small research and development projects. The proses with sputter
targets can be adapted to the production batches involving medium to large substrate areas. The chemical reaction can occur on the target
surface, in-flight or on the substrate depending on the process parameters. The many parameters make sputter deposition a complex process
but allow experts a large degree of control over the growth and microstructure of the area.
Applications of Sputtering Targets;
- Sputtering targets is used for film deposition. The deposition made by sputter targets is a method of depositing thin films by sputtering
that involves eroding material from a "target" source onto a "substrate" such as a silicon wafer.
- Semiconductor sputtering targets is used to etch the target. Sputter etching is chosen in cases where a high degree of etching anisotropy
is needed and selectivity is not a concern.
- Sputter targets is also used for analysis by etching away the target material.
One of the example occurs in secondary ion spectroscopy (SIMS), where the target sample is sputtered at a constant rate. As the target is sputtered,
the concentration and identity of sputtered atoms are measured using mass spectrometry. By helping of the sputtering target, the composition of the
target material can be determined and even extremely low concentrations of impurities are detected.
Sputtering target has also application area in space. Sputtering is one of the forms of space weathering, a process that changes the physical and
chemical properties of airless bodies, such as asteroids and the Moon.
Cerium is a member of the lanthanide series of metals and is the most abundant amongst the rare-earth elements in the earth’s crust. Cerium oxide
can be useful in various optical and electronic applications because of its high refractive index and its dielectric constant. Also, for corrosion protective
coatings cerium oxide can be chosen instead of chromate based coatings.
Cerium oxide is an inexpensive the most studied material and is widely used in many applications such as polishing materials, automotive exhaust
catalyst, gas sensors, electrolyte materials, oxygen storage, oxide fuel cells. Cerium oxide is suitable for microelectronics, various optical, electrooptical,
and optoelectronic devices, due to its unique properties such as moderate band gap, high refractive index and high dielectric constant.